Protrusion formation and surface porosity development on thermally annealed helium implanted copper

  1. Escobar Galindo, R.
  2. Van Veen, A.
  3. Evans, J.H.
  4. Schut, H.
  5. De Hosson, J.Th.M.
Revista:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Any de publicació: 2004

Volum: 217

Número: 2

Pàgines: 262-275

Tipus: Article

DOI: 10.1016/J.NIMB.2003.10.012 GOOGLE SCHOLAR