Protrusion formation and surface porosity development on thermally annealed helium implanted copper

  1. Escobar Galindo, R.
  2. Van Veen, A.
  3. Evans, J.H.
  4. Schut, H.
  5. De Hosson, J.Th.M.
Aldizkaria:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Argitalpen urtea: 2004

Alea: 217

Zenbakia: 2

Orrialdeak: 262-275

Mota: Artikulua

DOI: 10.1016/J.NIMB.2003.10.012 GOOGLE SCHOLAR