Protrusion formation and surface porosity development on thermally annealed helium implanted copper

  1. Escobar Galindo, R.
  2. Van Veen, A.
  3. Evans, J.H.
  4. Schut, H.
  5. De Hosson, J.Th.M.
Revista:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Ano de publicación: 2004

Volume: 217

Número: 2

Páxinas: 262-275

Tipo: Artigo

DOI: 10.1016/J.NIMB.2003.10.012 GOOGLE SCHOLAR