Protrusion formation and surface porosity development on thermally annealed helium implanted copper

  1. Escobar Galindo, R.
  2. Van Veen, A.
  3. Evans, J.H.
  4. Schut, H.
  5. De Hosson, J.Th.M.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 2004

Volume: 217

Issue: 2

Pages: 262-275

Type: Article

DOI: 10.1016/J.NIMB.2003.10.012 GOOGLE SCHOLAR
Data source: Scopus