Improvement in electrical properties of carbon nanotube via interconnects

  1. Katagiri, M.
  2. Yamazaki, Y.
  3. Wada, M.
  4. Kitamura, M.
  5. Sakuma, N.
  6. Suzuki, M.
  7. Sato, S.
  8. Nihei, M.
  9. Kajita, A.
  10. Sakai, T.
  11. Awano, Y.
Proceedings:
Advanced Metallization Conference (AMC)

ISSN: 1540-1766

ISBN: 9781617822810

Year of publication: 2010

Pages: 152-153

Type: Conference paper