Improvement in electrical properties of carbon nanotube via interconnects

  1. Katagiri, M.
  2. Yamazaki, Y.
  3. Wada, M.
  4. Kitamura, M.
  5. Sakuma, N.
  6. Suzuki, M.
  7. Sato, S.
  8. Nihei, M.
  9. Kajita, A.
  10. Sakai, T.
  11. Awano, Y.
Aktak:
Advanced Metallization Conference (AMC)

ISSN: 1540-1766

ISBN: 9781617822810

Argitalpen urtea: 2010

Orrialdeak: 152-153

Mota: Biltzar ekarpena