Lattice performance during initial steps of the Smart-Cut™ process in semiconducting diamond: A STEM study

  1. Piñero, J.C.
  2. de Vecchy, J.
  3. Fernández, D.
  4. Alba, G.
  5. Widiez, J.
  6. Di Cioccio, L.
  7. Lloret, F.
  8. Araujo, D.
  9. Pernot, J.
Revista:
Applied Surface Science

ISSN: 0169-4332

Any de publicació: 2020

Volum: 528

Tipus: Article

DOI: 10.1016/J.APSUSC.2020.146998 GOOGLE SCHOLAR
Font de les dades: Scopus