Lattice performance during initial steps of the Smart-Cut™ process in semiconducting diamond: A STEM study

  1. Piñero, J.C.
  2. de Vecchy, J.
  3. Fernández, D.
  4. Alba, G.
  5. Widiez, J.
  6. Di Cioccio, L.
  7. Lloret, F.
  8. Araujo, D.
  9. Pernot, J.
Aldizkaria:
Applied Surface Science

ISSN: 0169-4332

Argitalpen urtea: 2020

Alea: 528

Mota: Artikulua

DOI: 10.1016/J.APSUSC.2020.146998 GOOGLE SCHOLAR