Lattice performance during initial steps of the Smart-Cut™ process in semiconducting diamond: A STEM study

  1. Piñero, J.C.
  2. de Vecchy, J.
  3. Fernández, D.
  4. Alba, G.
  5. Widiez, J.
  6. Di Cioccio, L.
  7. Lloret, F.
  8. Araujo, D.
  9. Pernot, J.
Revista:
Applied Surface Science

ISSN: 0169-4332

Ano de publicación: 2020

Volume: 528

Tipo: Artigo

DOI: 10.1016/J.APSUSC.2020.146998 GOOGLE SCHOLAR