Lattice performance during initial steps of the Smart-Cut™ process in semiconducting diamond: A STEM study

  1. Piñero, J.C.
  2. de Vecchy, J.
  3. Fernández, D.
  4. Alba, G.
  5. Widiez, J.
  6. Di Cioccio, L.
  7. Lloret, F.
  8. Araujo, D.
  9. Pernot, J.
Journal:
Applied Surface Science

ISSN: 0169-4332

Year of publication: 2020

Volume: 528

Type: Article

DOI: 10.1016/J.APSUSC.2020.146998 GOOGLE SCHOLAR
Data source: Scopus