Lattice performance during initial steps of the Smart-Cut™ process in semiconducting diamond: A STEM study

  1. Piñero, J.C.
  2. de Vecchy, J.
  3. Fernández, D.
  4. Alba, G.
  5. Widiez, J.
  6. Di Cioccio, L.
  7. Lloret, F.
  8. Araujo, D.
  9. Pernot, J.
Zeitschrift:
Applied Surface Science

ISSN: 0169-4332

Datum der Publikation: 2020

Ausgabe: 528

Art: Artikel

DOI: 10.1016/J.APSUSC.2020.146998 GOOGLE SCHOLAR