Lattice performance during initial steps of the Smart-Cut™ process in semiconducting diamond: A STEM study

  1. Piñero, J.C.
  2. de Vecchy, J.
  3. Fernández, D.
  4. Alba, G.
  5. Widiez, J.
  6. Di Cioccio, L.
  7. Lloret, F.
  8. Araujo, D.
  9. Pernot, J.
Revue:
Applied Surface Science

ISSN: 0169-4332

Année de publication: 2020

Volumen: 528

Type: Article

DOI: 10.1016/J.APSUSC.2020.146998 GOOGLE SCHOLAR